Download GTU (Gujarat Technological University Ahmedabad) B.Tech/BE (Bachelor of Technology/ Bachelor of Engineering) 2020 Winter 7th Sem 2170311 Biomedical Microsystems Previous Question Paper
Enrolment No.___________
GUJARAT TECHNOLOGICAL UNIVERSITY
BE- SEMESTER?VII (NEW) EXAMINATION ? WINTER 2020
Subject Code:2170311 Date:30/01/2021
Subject Name:Biomedical Microsystems
Time:10:30 AM TO 12:30 PM Total Marks: 56
Instructions:
1. Attempt any FOUR questions out of EIGHT questions.
2. Make suitable assumptions wherever necessary.
3. Figures to the right indicate full marks.
MARKS
Q.1 (a) What are Miller indices?
03
(b) Explain Sputtering in detail.
04
(c) Explain PVD techniques used in MEMS technology.
07
Q.2 (a) Discuss various alternate materials used for manufacturing of MEMS.
03
(b) Explain Plasma etching with neat diagram
04
(c) Explain CVD technique used in manufacturing of MEMS.
07
Q.3 (a) Explain the effect of residual stress on MEMS device. Discuss the
03
equation which is used to find residual stress.
(b) Explain sacrificial surface micromachining. Mention the different
04
sacrificial used with different structural materials.
(c) Explain Wet etching with neat diagram.
07
Q.4 (a) Write and explain various CVD reactions.
03
(b) Explain manufacturing of Silicon On Insulator (SOI) substrate with
04
neat diagram.
(c) Explain LIGA fabrication process.
07
Q.5 (a) Explain process of annealing in MEMS
03
(b) Explain concept of electron tunneling.
04
(c) Explain Lift off process with neat diagram.
07
Q.6 (a) Explain concept of diffusion used in material doping. Give equation
03
which governs the diffusion process.
(b) With neat diagram explain the process of Implantation used in doping
04
process.
(c) Explain Diagnostic and Therapeutic Applications of Metal Nano
07
shells.
Q.7 (a) Explain current challenges in drug delivery and the remedies.
03
(b) Write short note on Biosensors arrays and Implantable devices.
04
(c) Explain Quantum dots usefulness as optical probes. Give one example.
07
Q.8 (a) Discuss materials which are used in drug delivery.
03
(b) Give classification of physical sensors, Integrated, Intelligent or Smart
04
sensors
(c) With neat diagram explain any one MEMS actuator design.
07
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This post was last modified on 04 March 2021