Download GTU BE/B.Tech 2019 Winter 7th Sem New 2170311 Biomedical Microsystems Question Paper

Download GTU (Gujarat Technological University) BE/BTech (Bachelor of Engineering / Bachelor of Technology) 2019 Winter 7th Sem New 2170311 Biomedical Microsystems Previous Question Paper

1
Seat No.: ________ Enrolment No.___________

GUJARAT TECHNOLOGICAL UNIVERSITY

BE - SEMESTER ? VII (New) EXAMINATION ? WINTER 2019
Subject Code: 2170311 Date: 03/12/2019

Subject Name: Biomedical Microsystems
Time: 10:30 AM TO 01:00 PM Total Marks: 70

Instructions:
1. Attempt all questions.
2. Make suitable assumptions wherever necessary.
3. Figures to the right indicate full marks.



MARKS

Q.1 (a) What is LIGA process? 03
(b) How MEMS technology will be useful in various fields? 04
(c) What is significance of Lift off process? Explain it in detail. 07

Q.2 (a) Define the terms: MEMS and Microelectronics. 03
(b) List out different techniques used for Wafer bonding. Explain any one
technique in detail.
04
(c) Explain chemical mechanical polishing in fabrication of MEMS. 07
OR
(c) Explain Bulk micromachining in detail. 07
Q.3 (a) Define Sensor Noise. 03
(b) Explain Smart sensors. 04
(c) Describe the process of plasma etching. 07
OR
Q.3 (a) Define Electron Tunneling. 03
(b) Explain Biosensors arrays in detail. 04
(c) Describe the process of wet etching. 07
Q.4 (a) Explain Bio sensing Principles of Micro biosensor. 03
(b) Explain MEMS Chemical Sensors. 04
(c) Write a short note on the processes of Physical Vapor Deposition (PVD) with
necessary diagrams.
07
OR
Q.4 (a) Explain Material Doping in fabrication process. 03
(b) Explain the steps of packaging in detail. 04
(c) Write a short note on the processes of Chemical Vapor Deposition (CVD) with
necessary diagrams.
07
Q.5 (a) Explain Microsystems for Biological Imaging. 03
(b) Define sacrificial layer and structural layers used in MEMS. 04
(c) Explain different Diagnostic applications of Metal Nano shells. 07
OR

Q.5 (a) Explain MEMS Actuators. 03
(b) Explain Classification of micro physical sensors. 04
(c) Explain mechanism and working of micro devices for oral drug delivery
system.
07

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