Download JNTUA M.Tech 2nd Sem 2019 Feb 17D06206 MEMS and Its Applications Question Paper

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Code: 17D06206

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M.Tech II Semester Supplementary Examinations January/February 2019

MEMS & ITS APPLICATIONS

(Common to DSCE, ES, VLSI&ES, ES&VLSI and VLSI&ESD)

(For students admitted in 2017 only)

Time: 3 hours

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Max. Marks: 60

Answer all the questions

1. Discuss about broad response of micro electromechanical system to mechanical and thermal point of view.

2. Explain the following:

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   1. Power dissipation in MEMS.
   2. Importance of cantilever beam.

   OR

3. 1. Write a note on deflection curves for cantilevers and fixed beams.

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   2. Give an account on approximate solutions.

   OR

4. 1. Draw deflection Vs voltage curve for MEMS.
   2. Give the physical significance of electro-static excitation.

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5. 1. Write the applications of variable capacitors.
   2. Explain two terminal MEM structure.

   OR

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6. 1. Draw capacitance Vs voltage curve for MEMS.
   2. Write the applications of MEMS.
7. 1. Write the advantages of optical MEMS.
   2. Discuss about triggering application to counters and converters.

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   OR

8. Draw the basic MEM circuits and structures

9. 1. Give the importance of metal based MEMS.

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   2. Write the applications of silicon based MEMS.

   OR

10. Explain the following:

    1. Etching technologies.

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    2. Thick film technology for MEMS.

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