Download PTU B.Tech 2021 Jan ECE 5th Sem 78709 Vlsiulsi Technology Question Paper

Download PTU (Punjab Technical University) B.Tech (Bachelor of Technology) / BE (Bachelor of Engineering) 2021 January ECE 5th Sem 78709 Vlsiulsi Technology Previous Question Paper

Roll No.
Total No. of Pages : 02
Total No. of Questions : 18
B.Tech. (ECE) (Sem.?5)
VLSI/ULSI TECHNOLOGY
Subject Code : BTEC-905C-18
M.Code : 78709
Time : 3 Hrs. Max. Marks : 60
INST RUCT IONS T O CANDIDAT ES :
1 .
SECT ION-A is COMPULSORY cons is ting of TEN questions carrying TWO marks
each.
2 .
SECT ION-B c ontains F IVE questions c arrying FIVE marks eac h and s tud ents
have to atte mpt any FOUR q ues tions.
3 .
SECT ION-C contains THREE questions carrying T EN marks e ach and s tudents
have to atte mpt any T WO questio ns.
SECTION-A
Write briefly :
1)
Define polishing process.
2)
What are various thin oxide properties?
3)
Explain dry, HCL dry and wet oxidation.
4)
Define the term lithography.
5)
What are various clean room and safety requirements?
6)
What are the desired properties of metallization for integrated circuits?
7)
Explain mask generation.
8)
Enlist RTP techniques.
9)
Define rapid thermal processing.
10) Explain CVD.
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( S 2 ) - 3 5 7

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SECTION-B
11) Describe characterization of impurity profiles.
12) Explain the various effects of impurities and damage on oxidation rate.
13) What are wet chemical etching techniques?
14) Explain RIE techniques.
15) Explain newer lithography techniques for VLSI/ULSI.
SECTION-C
16) Explain CVD techniques for deposition of polysilicon.
17) Describe various oxidation techniques.
18) List possible ways of growing an oxide on a substrate without forming oxidation induced
stacking faults.
NOTE : Disclosure of Identity by writing Mobile No. or Making of passing request on any
page of Answer Sheet will lead to UMC against the Student.
2 | M - 7 8 7 0 9
( S 2 ) - 3 5 7

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