Download PTU B.Tech 2021 Jan ECE 5th Sem 78709 Vlsiulsi Technology Question Paper

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Roll No. Total No. of Pages : 02
Total No. of Questions : 18

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B.Tech. (ECE) (Sem.-5)
VLSI/ULSI TECHNOLOGY
Subject Code : BTEC-905C-18
M.Code : 78709
Time : 3 Hrs. Max. Marks : 60

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INSTRUCTIONS TO CANDIDATES :

1. SECTION-A is COMPULSORY consisting of TEN questions carrying TWO marks each.
2. SECTION-B contains FIVE questions carrying FIVE marks each and students have to attempt any FOUR questions.
3. SECTION-C contains THREE questions carrying TEN marks each and students have to attempt any TWO questions.

SECTION-A

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Write briefly :

1. Define polishing process.
2. What are various thin oxide properties?
3. Explain dry, HCL dry and wet oxidation.
4. Define the term lithography.

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5. What are various clean room and safety requirements?
6. What are the desired properties of metallization for integrated circuits?
7. Explain mask generation.
8. Enlist RTP techniques.
9. Define rapid thermal processing.

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10. Explain CVD.

SECTION-B

11. Describe characterization of impurity profiles.
12. Explain the various effects of impurities and damage on oxidation rate.
13. What are wet chemical etching techniques?

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14. Explain RIE techniques.
15. Explain newer lithography techniques for VLSI/ULSI

SECTION-C

16. Explain CVD techniques for deposition of polysilicon.
17. Describe various oxidation techniques.

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18. List possible ways of growing an oxide on a substrate without forming oxidation induced stacking faults.

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