This download link is referred from the post: PTU B.Tech 5th Semester Last 10 Years 2011-2021 Previous Question Papers|| Punjab Technical University
Roll No. Total No. of Pages : 02
Total No. of Questions : 18
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B.Tech. (ECE) (Sem.-5)
VLSI/ULSI TECHNOLOGY
Subject Code : BTEC-905C-18
M.Code : 78709
Time : 3 Hrs. Max. Marks : 60
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INSTRUCTIONS TO CANDIDATES :
- SECTION-A is COMPULSORY consisting of TEN questions carrying TWO marks each.
- SECTION-B contains FIVE questions carrying FIVE marks each and students have to attempt any FOUR questions.
- SECTION-C contains THREE questions carrying TEN marks each and students have to attempt any TWO questions.
SECTION-A
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Write briefly :
- Define polishing process.
- What are various thin oxide properties?
- Explain dry, HCL dry and wet oxidation.
- Define the term lithography.
- What are various clean room and safety requirements?
- What are the desired properties of metallization for integrated circuits?
- Explain mask generation.
- Enlist RTP techniques.
- Define rapid thermal processing.
- Explain CVD.
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SECTION-B
- Describe characterization of impurity profiles.
- Explain the various effects of impurities and damage on oxidation rate.
- What are wet chemical etching techniques?
- Explain RIE techniques.
- Explain newer lithography techniques for VLSI/ULSI
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SECTION-C
- Explain CVD techniques for deposition of polysilicon.
- Describe various oxidation techniques.
- List possible ways of growing an oxide on a substrate without forming oxidation induced stacking faults.
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NOTE : Disclosure of Identity by writing Mobile No. or Making of passing request on any page of Answer Sheet will lead to UMC against the Student.
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This download link is referred from the post: PTU B.Tech 5th Semester Last 10 Years 2011-2021 Previous Question Papers|| Punjab Technical University