Download JNTUA M.Tech 2nd Sem 2019 Feb 17D06206 MEMS and Its Applications Question Paper

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Code: 17D06206

M.Tech II Semester Supplementary Examinations January/February 2019
MEMS & ITS APPLICATIONS
(Common to DSCE, ES, VLSI&ES, ES&VLSI and VLSI&ESD)
(For students admitted in 2017 only)

Time: 3 hours Max. Marks: 60

Answer all the questions

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1 Discuss about broad response of micro electromechanical system to mechanical and thermal
point of view.
OR
2 Explain the following:
(a) Power dissipation in MEMS.
(b) Importance of cantilever beam.

3 (a) Write a note on deflection curves for cantilevers and fixed beams.
(b) Give an account on approximate solutions.
OR
4 (a) Draw deflection Vs voltage curve for MEMS.
(b) Give the physical significance of electro-static excitation.

5 (a) Write the applications of variable capacitors.
(b) Explain two terminal MEM structure.
OR
6 (a) Draw capacitance Vs voltage curve for MEMS.
(b) Write the applications of MEMS.

7 (a) Write the advantages of optical MEMS.
(b) Discuss about triggering application to counters and converters.
OR
8 Draw the basic MEM circuits and structures for OR, NOR and Exclusive OR gates.

9 (a) Give the importance of metal based MEMS.
(b) Write the applications of silicon based MEMS.
OR
10 Explain the following:
(a) Etching technologies.
(b) Thick film technology for MEMS.

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